Title:
塗布機構、塗布装置、被塗布対象物の製造方法、および基板の製造方法
Document Type and Number:
Japanese Patent JP6587945
Kind Code:
B2
Abstract:
An application material container has a fixed portion (21b) and a container portion (21a). The fixed portion (21b) is configured to be fixable to a fixing member (69) included in an application mechanism. The container portion (21a) is provided with, in upper and lower portions thereof, a hole (71) and a hole (72) through which an application needle (24) passes. A side surface of the container portion (21a) has a first flange (80). A lower surface of the first flange (80) is in contact with an upper surface of the fixed portion (21b). A gap is provided between a portion lower than the first flange (80) on the side surface of the container portion (21a) and a side surface of the fixed portion (21b). The container portion (21a) is horizontally movable within a range of the gap.
Inventors:
Akihiro Yamanaka
Application Number:
JP2016013003A
Publication Date:
October 09, 2019
Filing Date:
January 27, 2016
Export Citation:
Assignee:
ntn corporation
International Classes:
B05C1/02; B05D1/28; H05K3/10
Domestic Patent References:
| JP2006276188A | ||||
| JP2006310266A | ||||
| JP4802027B2 |
Attorney, Agent or Firm:
Fukami patent office