Title:
振動装置
Document Type and Number:
Japanese Patent JP6590082
Kind Code:
B2
Abstract:
The vibration device includes a diaphragm, and a plurality of piezoelectric films that are arranged at predetermined intervals in a first direction of the diaphragm to face the diaphragm and extend parallel to a second direction orthogonal to the first direction. The diaphragm has at least one slit formed therein and dividing the diaphragm into respective regions. Each of the piezoelectric films are fixed to a respective region of the diaphragm while extending along the second direction in a tensioned state. The piezoelectric films expand and contract in a plane direction when a voltage is applied thereto.
Inventors:
Kentaro Usui
Junichi Hashimoto
Yuhei Yamagishi
Junichi Hashimoto
Yuhei Yamagishi
Application Number:
JP2018550181A
Publication Date:
October 16, 2019
Filing Date:
November 06, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
B06B1/06; G06F3/02; G06F3/041; H01L41/113; H01L41/193; H01L41/23
Foreign References:
| WO2016027667A1 | ||||
| WO2015190358A1 | ||||
| WO2012157691A1 | ||||
| WO2012061495A1 |
Attorney, Agent or Firm:
Kaede International Patent Office