Title:
温度補償機能付センサ素子とそれを用いた磁気センサおよび電力測定装置
Document Type and Number:
Japanese Patent JP6590422
Kind Code:
B2
Abstract:
A magnetoresistance effect type magnetic sensor has a problem in that the increase in the surrounding temperature decreases the magnetic characteristic of a magnetic film itself and thereby decreases the sensitivity of the sensor. A sensor element includes: a magnetic film having magnetoresistance effect; a pair of electrodes for applying an electric current to the magnetic film, the pair of electrodes being opposed across the magnetic film; a longitudinal bias magnetic field addition magnet to generate a first bias magnetic field in an opposing direction of the electrodes; and a lateral bias magnetic field addition magnet to generate a second bias magnetic field in an orthogonal direction to the longitudinal bias magnetic field addition magnet, in which a temperature characteristic of the longitudinal bias magnetic field addition magnet is higher than a temperature characteristic of the lateral bias magnetic field addition magnet.
Inventors:
Hiroaki Tsujimoto
Application Number:
JP2018105869A
Publication Date:
October 16, 2019
Filing Date:
June 01, 2018
Export Citation:
Assignee:
Public University Corporation Osaka
International Classes:
G01R21/08; G01R33/09; H01L43/02; H01L43/08
Domestic Patent References:
| JP2012150084A | ||||
| JP2012150007A | ||||
| JP2012042259A | ||||
| JP2001153683A | ||||
| JP2004020371A |
Foreign References:
| WO2012105459A1 | ||||
| WO1996006329A1 |
Attorney, Agent or Firm:
Seiji Ohno
Takeshi Katata
Matsuno Chihiro
Seiichi Sakitani
Takeshi Katata
Matsuno Chihiro
Seiichi Sakitani