Title:
基板収納容器
Document Type and Number:
Japanese Patent JP6591297
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the maximum value of torque required for the lock operation.SOLUTION: A substrate housing container 1 includes a container body 2, a lid 3 attached to the container body 2, and a lock mechanism 4 for fixing the lid 3 removably to the container body 2. The cam reel 32 of the lock mechanism 4 includes a first cam mechanism 10 performing first operation for engaging the tip 59 with a lock hole 8, by converting the rotation of the cam reel 32 in the lock direction DL into linear motion of a latch lever 33 in a direction crossing the rotation axis A, and a second cam mechanism 20 performing second operation for pulling the lid 3 into the container body 2, by converting the rotation of the cam reel 32 in the lock direction DL into linear motion of the latch lever 33 in a direction of the rotation axis A. The second angle region θ2 in the second cam mechanism 20 is larger than the first angle region θ1 in the first cam mechanism 10, but smaller than lock region θa.SELECTED DRAWING: Figure 6
Inventors:
Masashi Kojima
Kazumasa Onuki
Kazumasa Onuki
Application Number:
JP2016008861A
Publication Date:
October 16, 2019
Filing Date:
January 20, 2016
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/673
Domestic Patent References:
| JP11091865A | ||||
| JP2008098236A | ||||
| JP2006303015A | ||||
| JP2013038217A | ||||
| JP2014093381A | ||||
| JP2013016743A | ||||
| JP2005203768A | ||||
| JP2013229630A | ||||
| JP2002198353A | ||||
| JP2007191205A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yoshinori Shimizu
Hideki Komatsu
Yoshiki Kuroki
Yoshinori Shimizu
Hideki Komatsu