Title:
光学装置用支持装置、光学装置及びリソグラフィーシステム
Document Type and Number:
Japanese Patent JP6596419
Kind Code:
B2
Abstract:
A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction.
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Inventors:
Henner Baitinger
Marx Hauf
Marx Hauf
Application Number:
JP2016534645A
Publication Date:
October 23, 2019
Filing Date:
October 14, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B7/182; G03F7/20
Domestic Patent References:
| JP2005275270A | ||||
| JP201085494A | ||||
| JP2006227100A |
Attorney, Agent or Firm:
Kenji Sugimura
Yuro Yoshizawa
Takuro Abe
Yuro Yoshizawa
Takuro Abe