Title:
シャワーヘッド及び成膜装置
Document Type and Number:
Japanese Patent JP6596435
Kind Code:
B2
Abstract:
A shower head for a film forming apparatus is provided. The shower head includes: a gas injection plate provided with a plurality of gas injection holes extending in the thickness direction thereof; and a gas supply unit that provides a plurality of flow paths that guide gas to the plurality of gas injection holes from a common flow path, each of the plurality of flow paths having one end connected to the common flow path and the other end. Among the flow paths, any two paths that satisfy the condition of a first linear distance between the positions of the ends of one flow path being shorter than a second linear distance between the positions of the ends of the other flow path have a relationship wherein the difference between the length of the one flow path and the first linear distance is larger than the difference between the length of the other flow path and the second linear distance.
Inventors:
Yoji Iizuka
Application Number:
JP2016548820A
Publication Date:
October 23, 2019
Filing Date:
August 31, 2015
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/455; H01L21/205; H01L21/3065
Domestic Patent References:
| JP8291385A | ||||
| JP2013194263A | ||||
| JP2014057047A | ||||
| JP2000212752A | ||||
| JP2004277772A | ||||
| JP2008208462A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashiwaoka
Yoshiki Kuroki
Junji Kashiwaoka