Title:
研磨パッド及びその製造方法
Document Type and Number:
Japanese Patent JP6600149
Kind Code:
B2
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Inventors:
Hirohito Miyasaka
Teppei Tateno
Tatsuma Matsuoka
Kae Kae
Teppei Tateno
Tatsuma Matsuoka
Kae Kae
Application Number:
JP2015076726A
Publication Date:
October 30, 2019
Filing Date:
April 03, 2015
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/24; C08G18/10; C08G18/32; C08J9/32; H01L21/304
Domestic Patent References:
| JP2012528487A | ||||
| JP2015062260A | ||||
| JP2013089767A | ||||
| JP2000344902A | ||||
| JP2012115982A | ||||
| JP2004507076A |
Attorney, Agent or Firm:
Shinichiro Tanaka
Hiroyuki Suda
Kazuo Yamazaki
Satsuki Ichikawa
Hironobu Hattori
Yasushi Sasaki
Hiroyuki Suda
Kazuo Yamazaki
Satsuki Ichikawa
Hironobu Hattori
Yasushi Sasaki