Title:
フレキシブル導電振動膜、フレキシブル振動センサ及びその製造方法と応用
Document Type and Number:
Japanese Patent JP6603327
Kind Code:
B2
Inventors:
Tension
Consultation
Consultation
Application Number:
JP2017549048A
Publication Date:
November 06, 2019
Filing Date:
August 13, 2015
Export Citation:
Assignee:
SUZHOU INSTITUTE OF NANO-TECH AND NANO-BIONICS(SINANO),CHINESE ACADEMY OF SCIENCES
International Classes:
G01H11/06
Domestic Patent References:
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Foreign References:
| WO2014117724A1 | ||||
| CN203710011U | ||||
| CN104359597A | ||||
| WO2013137175A1 | ||||
| US20090185701 | ||||
| US20050104145 |
Attorney, Agent or Firm:
sk patent corporation
Akihiko Okuno
Hiroyuki Ito
Akihiko Okuno
Hiroyuki Ito