Title:
複合材料及びその製造方法、並びにその製造装置
Document Type and Number:
Japanese Patent JP6603491
Kind Code:
B2
Inventors:
Shinji Yae
Susumu Sakamoto
Kenji Fukuda
Susumu Sakamoto
Kenji Fukuda
Application Number:
JP2015130292A
Publication Date:
November 06, 2019
Filing Date:
June 29, 2015
Export Citation:
Assignee:
Public University Corporation Hyogo Prefectural University
Nippon Oikos Co., Ltd.
Nippon Oikos Co., Ltd.
International Classes:
C23C18/18; C23C18/16; H01L21/28; H01L21/288; H01L21/3205; H01L21/768; H01L23/532
Domestic Patent References:
| JP4135091A | ||||
| JP2009527918A | ||||
| JP2014019933A | ||||
| JP2005336600A | ||||
| JP2011198780A | ||||
| JP61143580A | ||||
| JP4215855A | ||||
| JP2000144437A |
Attorney, Agent or Firm:
Hiroaki Kono