Title:
成膜装置
Document Type and Number:
Japanese Patent JP6607716
Kind Code:
B2
Inventors:
Naoto Ishibashi
Kageshima
Seiichi Takahashi
Kageshima
Seiichi Takahashi
Application Number:
JP2015134420A
Publication Date:
November 20, 2019
Filing Date:
July 03, 2015
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
H01L21/205; C23C16/46; C30B29/36
Domestic Patent References:
| JP2011049309A | ||||
| JP2013503490A | ||||
| JP2011066355A | ||||
| JP2015050436A | ||||
| JP2005518A | ||||
| JP2002026112A | ||||
| JP2001284280A |
Foreign References:
| WO2010087385A1 |
Attorney, Agent or Firm:
Shu Oikawa
Norihiko Ara
Tomoo Katsumata
Masatake Shiga
Suzuki Mitsuyoshi
Osamu Mikuni
Norihiko Ara
Tomoo Katsumata
Masatake Shiga
Suzuki Mitsuyoshi
Osamu Mikuni