Title:
外観検査装置、外観検査方法及び該外観検査装置に用いるコントローラで実行することが可能なコンピュータプログラム
Document Type and Number:
Japanese Patent JP6608708
Kind Code:
B2
Inventors:
Hideaki Sato
Application Number:
JP2016002458A
Publication Date:
November 20, 2019
Filing Date:
January 08, 2016
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01N21/88
Domestic Patent References:
JP2011043363A | ||||
JP2010210373A | ||||
JP10300444A | ||||
JP10032810A |
Foreign References:
US20020186878 |
Attorney, Agent or Firm:
Masaya Fukunaga