Title:
静電式ワーク保持方法，静電式ワーク保持システム及びワーク保持装置
Document Type and Number:
Japanese Patent JP6609735
Kind Code:
B2
Abstract:
An electrostatic workpiece-holding method includes an initialization step, a static elimination step, a workpiece setting step, a workpiece attracting step, and a workpiece release step. The initialization step is a step of applying a positive voltage to electrode of the electrostatic attracting part while applying a negative voltage to electrode. The static elimination step is a step of removing the static charge on the surface of the electrostatic attracting part. The workpiece setting step is a step of placing the workpiece in contact with the surface of the electrostatic attracting part. The workpiece attracting step is a step of interrupting the application of the positive voltage to electrode of the electrostatic attracting part and the application of the negative voltage to electrode. The workpiece release step is a step of applying the positive voltage to electrode of the electrostatic attracting part while applying the negative voltage to electrode.
Inventors:
Ozawa Masaru
Application Number:
JP2019529653A
Publication Date:
November 27, 2019
Filing Date:
July 25, 2018
Export Citation:
Assignee:
Creative Technology Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2000348659A | ||||
| JP2008041993A | ||||
| JP5315429A | ||||
| JP8083832A |
Foreign References:
| WO2006049085A1 | ||||
| WO2016167224A1 |
Attorney, Agent or Firm:
Takakazu Tsukahara