Title:
テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械
Document Type and Number:
Japanese Patent JP6610083
Kind Code:
B2
Inventors:
Takeshi Nakamura
Application Number:
JP2015165071A
Publication Date:
November 27, 2019
Filing Date:
August 24, 2015
Export Citation:
Assignee:
Nippon Seiko Co., Ltd.
International Classes:
B23Q1/01; B23Q1/40; B23Q1/62; B23Q3/08; H01L21/68
Domestic Patent References:
| JP10006164A | ||||
| JP3117537U | ||||
| JP8270666A | ||||
| JP2009190123A |
Foreign References:
| US20070163377 |
Attorney, Agent or Firm:
Hiroaki Sakai