Title:
エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
Document Type and Number:
Japanese Patent JP6610697
Kind Code:
B2
Inventors:
Masahiko Goto
Toru Morita
Toru Morita
Application Number:
JP2018075265A
Publication Date:
November 27, 2019
Filing Date:
April 10, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01D5/12; G01D5/347
Domestic Patent References:
| JP200814799A | ||||
| JP1248019A | ||||
| JP2015114192A |
Attorney, Agent or Firm:
Kazuya Nishi