Title:
基板ガイド、キャリア
Document Type and Number:
Japanese Patent JP6610980
Kind Code:
B2
Abstract:
A substrate guide of the present invention is provided on a carrier frame of a carrier which holds a substrate substantially vertically so that a surface of the substrate is in a substantially vertical direction and supports the substrate by being in contact with at least a peripheral edge end surface portion of the substrate. The substrate guide includes a base attached to the carrier frame, a substrate support which comes into contact with the peripheral edge end surface portion of the substrate held by the carrier and is attached to the base to be movable in a normal direction of the peripheral edge end surface portion in a direction parallel to the surface of the substrate, and a force-applying member which applies a force to the substrate support toward the substrate with respect to the base.
More Like This:
| JPS61187342 | CHIP RECOGNITION USING TRANSPARENT CHIP TRAY |
Inventors:
Toshinori Kaneko
Tetsuhiro Ohno
Tetsuhiro Ohno
Application Number:
JP2018560681A
Publication Date:
November 27, 2019
Filing Date:
June 07, 2018
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/673; C23C14/50; C23C16/458
Domestic Patent References:
| JP2007262539A | ||||
| JP2005272113A | ||||
| JP2004315146A | ||||
| JP2004296672A |
Foreign References:
| WO2008133149A1 |
Attorney, Agent or Firm:
Shu Oikawa
Tomoo Katsumata
Ryo Tsuchiya
Tomoo Katsumata
Ryo Tsuchiya