Title:
流量測定システム
Document Type and Number:
Japanese Patent JP6614174
Kind Code:
B2
Abstract:
A flow rate measurement system measures, by using a flow rate measurement device, a flow rate of cleaning gas in a container storage facility including: a storage rack including supporting portions; a transport device that transports a container to the supporting portions; and a gas supply device that supplies the cleaning gas to the container supported by the supporting portions. The transport device and the flow rate measurement device are connected via a power line communicatively by wire or wireless. The flow rate measurement device measures the flow rate of the cleaning gas in a state in which the transport device has transported the flow rate measurement device and the flow rate measurement device is placed on a target supporting portion.
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Inventors:
Ueda Toshito
Jun Tanaka
Kawamura Shinsuke
Jun Tanaka
Kawamura Shinsuke
Application Number:
JP2017021571A
Publication Date:
December 04, 2019
Filing Date:
February 08, 2017
Export Citation:
Assignee:
Daifuku Co., Ltd.
International Classes:
H01L21/673; G01F1/00; G01F15/06
Domestic Patent References:
| JP2010182747A | ||||
| JP2016127228A | ||||
| JP2015012041A | ||||
| JP2008159734A | ||||
| JP2002124457A |
Foreign References:
| WO2014136506A1 | ||||
| WO2016129170A1 |
Attorney, Agent or Firm:
Patent business corporation r&c