Title:
液滴吐出装置、及び液滴吐出検査方法
Document Type and Number:
Japanese Patent JP6616707
Kind Code:
B2
Inventors:
Keiichiro Hayashi
Application Number:
JP2016024819A
Publication Date:
December 04, 2019
Filing Date:
February 12, 2016
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01B11/24; B05C11/00; B41J2/01
Domestic Patent References:
| JP2009226741A | ||||
| JP2005205317A | ||||
| JP2005201895A | ||||
| JP2010193047A | ||||
| JP2002259943A |
Foreign References:
| US6752483 | ||||
| WO2015083684A1 | ||||
| WO2009128572A1 |
Attorney, Agent or Firm:
Takashi Kawai
Hitoshi Nakano
Hitoshi Nakano