Title:
高Ｑ ＭＥＭＳ共振子
Document Type and Number:
Japanese Patent JP6617902
Kind Code:
B2
Abstract:
A symmetrical MEMS resonator is disclosed with a high quality factor. The MEMS resonator includes a silicon layer with a top surface and bottom surface opposite the top surface. A pair of first metal layers is provided above the top surface of the silicon layer and a corresponding pair of second metal layers is symmetrically provided below the second surface of the silicon layer relative to the pair of first metal layers. Furthermore, a first piezoelectric layer is disposed between the pair of first metal layers and a second piezoelectric layer is disposed between the pair of second metal layers.
Inventors:
Kayakari Ville
Application Number:
JP2018509738A
Publication Date:
December 11, 2019
Filing Date:
May 24, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H9/24; H01L41/04; H01L41/047; H01L41/053; H01L41/09
Domestic Patent References:
| JP2015088521A | ||||
| JP2008048315A | ||||
| JP2008545333A |
Foreign References:
| US8947171 | ||||
| US20100314969 | ||||
| US20140265726 | ||||
| WO2014185280A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Mutsumi Sato
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Mutsumi Sato