均一細孔分布を有する多孔質ガラス膜を用いたろ過方法とその装置

Title:

均一細孔分布を有する多孔質ガラス膜を用いたろ過方法とその装置

Document Type and Number:

Japanese Patent JP6627409

Kind Code:

B2

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Inventors:

Mitsuteru Fujiwara
Shunichi Itohira
Daigo Maeda

Application Number:

JP2015208394A

Publication Date:

January 08, 2020

Filing Date:

October 02, 2015

Export Citation:

Assignee:

SP G Techno Co., Ltd.

International Classes:

B01D71/04; B01D39/20; B01D63/06; B01D65/08; B01D69/00; B01D69/04; B03B5/00

Domestic Patent References:

Previous Patent: 半導体装置及び半導体装置の製造方法

Next Patent: 加工装置