Title:
エピタキシャル炭化珪素単結晶ウェハの製造方法
Document Type and Number:
Japanese Patent JP6628581
Kind Code:
B2
Inventors:
Takashi Aigo
Wataru Ito
Tatsuo Fujimoto
Wataru Ito
Tatsuo Fujimoto
Application Number:
JP2015235050A
Publication Date:
January 08, 2020
Filing Date:
December 01, 2015
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
C30B29/36
Domestic Patent References:
| JP2007284298A |
Foreign References:
| WO2014196394A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Masatoshi Takahashi
Naori Kota
Hajime Kawahara
Yasuo Dogaki
Shinji Mitsuhashi
Masatoshi Takahashi
Naori Kota
Hajime Kawahara
Yasuo Dogaki