Title:
処理装置
Document Type and Number:
Japanese Patent JP6631450
Kind Code:
B2
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Inventors:
Kazutaka Iizuka
Takashi Ikejiri
Kumamoto Shoichiro
Takashi Ikejiri
Kumamoto Shoichiro
Application Number:
JP2016183714A
Publication Date:
January 15, 2020
Filing Date:
September 21, 2016
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
C23C16/44; C23C16/54; H05H1/46
Domestic Patent References:
JP2015094022A | ||||
JP2010251008A |
Attorney, Agent or Firm:
Meisei International Patent Office