Title:
粘着シート及び半導体装置製造方法
Document Type and Number:
Japanese Patent JP6632324
Kind Code:
B2
More Like This:
Inventors:
Takeshi Takano
Kikuchi Kazuhiro
Emi Fuchi
Kikuchi Kazuhiro
Emi Fuchi
Application Number:
JP2015212277A
Publication Date:
January 22, 2020
Filing Date:
October 28, 2015
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
C09J7/20; C09J133/04; C09J201/00; H01L21/56
Domestic Patent References:
| JP2001313350A | ||||
| JP2014110337A | ||||
| JP2015168711A | ||||
| JP2012062372A |
Foreign References:
| WO2009110426A1 |
Attorney, Agent or Firm:
Intellectual Property Office