Title:
基板を洗い流し乾燥させるためのシステム及び方法
Document Type and Number:
Japanese Patent JP6637047
Kind Code:
B2
Abstract:
In some embodiments, a system is provided that includes (1) a loading position; (2) a drying position; (3) a movable tank configured to (a) hold at least one substrate; (b) hold a cleaning chemistry so as to expose a substrate within the movable tank to the cleaning chemistry; and (c) translate between the loading position and the drying position; and (4) a drying station located at the drying position and configured to rinse and dry a substrate as the substrate is unloaded from the movable tank when the movable tank is at the drying position. Numerous other aspects are provided.
Inventors:
Mihailichenko, Ekaterina
Brown, Brian J.
Hanson, Kyle M.
Francischetti, Vincent S.
Brown, Brian J.
Hanson, Kyle M.
Francischetti, Vincent S.
Application Number:
JP2017533258A
Publication Date:
January 29, 2020
Filing Date:
December 18, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/304
Domestic Patent References:
| JP2011014706A | ||||
| JP2000306881A | ||||
| JP2011222595A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation