Title:
セラミック薄膜の低温堆積方法
Document Type and Number:
Japanese Patent JP6637095
Kind Code:
B2
Inventors:
Gasil Prasad Nahar
Deucha peter joseph
Deucha peter joseph
Application Number:
JP2018054004A
Publication Date:
January 29, 2020
Filing Date:
March 22, 2018
Export Citation:
Assignee:
Gasil Prasad Nahar
Deucha peter joseph
Deucha peter joseph
International Classes:
C23C16/32; C23C16/34; C23C16/38; C23C16/42
Domestic Patent References:
| JP64052069A | ||||
| JP2004335757A | ||||
| JP2011178611A | ||||
| JP63057772A | ||||
| JP2009055000A | ||||
| JP2004296537A | ||||
| JP2010512646A | ||||
| JP6135711A | ||||
| JP3237096A | ||||
| JP2007277723A |
Attorney, Agent or Firm:
Masayuki Masabayashi
Hayashi Ichiyoshi
Tetsuo Shiba
Iwaike Mitsuru
Hayashi Ichiyoshi
Tetsuo Shiba
Iwaike Mitsuru