Title:
アルミナ焼結体及び光学素子用下地基板
Document Type and Number:
Japanese Patent JP6646658
Kind Code:
B2
Abstract:
An alumina sintered body according to the present invention includes a surface having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained through X-ray irradiation at 2θ=20° to 70°. The alumina sintered body contains Mg and F, a Mg/F mass ratio is 0.05 to 3500, and a Mg content is 30 to 3500 ppm by mass. The alumina sintered body has a crystal grain size of 15 to 200 μm. When a field of view of 370.0 μm long×372.0 μm wide is photographed with a 1000-fold magnification and the photograph is visually observed, a number of pores having a diameter of 0.2 to 0.6 μm is 250 or less.
Inventors:
Kiyoshi Matsushima
Watanabe Morido
Kei Sato
Tsutomu Nanataki
Watanabe Morido
Kei Sato
Tsutomu Nanataki
Application Number:
JP2017517975A
Publication Date:
February 14, 2020
Filing Date:
May 12, 2016
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
C01F7/02; C04B35/117; C01F7/442; G01N23/207; H01L33/02
Domestic Patent References:
| JP53112912A | ||||
| JP2001064075A | ||||
| JP2006310272A |
Foreign References:
| WO2010082396A1 | ||||
| US20110039685 |
Attorney, Agent or Firm:
Aitec International Patent Office