Title:
閉鎖装置、閉鎖装置付き真空システム、及び閉鎖装置の操作方法
Document Type and Number:
Japanese Patent JP6648280
Kind Code:
B2
Abstract:
A closing device (100, 200), particularly for closing an opening of a vacuum chamber, is provided. The closing device includes: a flange (110) to be provided at a vacuum chamber and comprising an opening (112); a blocking device (120, 220) configured to close the opening (112); a first magnetic device (130) configured to generate a magnetic closing force between the flange (110) and the blocking device (120) for transferring at least a part of the blocking device from an open position (I) to a closed position (II); and a magnetic levitation system (150) configured to contactlessly transport the blocking device (120) along a guiding structure in a first direction (T) parallel to the flange (110), wherein the magnetic levitation system comprises a second magnetic device (160) configured to stabilize the blocking device (120) in a second direction (X) transverse to the first direction (T).
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Inventors:
Oldendorf, Ulrich
Kresen, Christoph
Kresen, Christoph
Application Number:
JP2018529294A
Publication Date:
February 14, 2020
Filing Date:
June 08, 2017
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
F16K51/02; C23C14/56; C23C16/44; F16C32/04; F16K3/18; H02K41/03
Domestic Patent References:
| JP2017523354A |
Foreign References:
| US20150188399 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation