Title:
基板処理装置およびその品質保証方法
Document Type and Number:
Japanese Patent JP6649073
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of realizing EEQA efficiently and a method for quality assurance of the same.SOLUTION: A substrate processing apparatus (100) includes: a substrate processing unit (10) for processing a substrate; and an apparatus quality assurance control unit (50) for acquiring apparatus operation data of the substrate processing unit (10) to perform abnormality determination on the basis of the apparatus operation data.SELECTED DRAWING: Figure 1
Inventors:
Takeda Koichi
Application Number:
JP2015245256A
Publication Date:
February 19, 2020
Filing Date:
December 16, 2015
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01L21/02; G05B19/418; H01L21/304
Domestic Patent References:
| JP2009148877A | ||||
| JP2011146461A | ||||
| JP2014042968A | ||||
| JP2000269108A | ||||
| JP2009522126A |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Tsukuda Seigen
Hiroshi Nomoto
Kobayashi Hideyoshi
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Tsukuda Seigen
Hiroshi Nomoto