Title:
圧力センサ
Document Type and Number:
Japanese Patent JP6650154
Kind Code:
B2
Abstract:
Provided is a pressure sensor having high-performance characteristics. The pressure sensor 100 is provided with: one or more diaphragms 104; an opposing electrode 105 disposed so as to oppose the diaphragms 104; an input circuit 106a which, in response to a vibration signal of the diaphragms 104, converts a capacitance between the diaphragms 104 and the opposing electrode 105 into a voltage, current, or frequency signal; and a signal processing circuit 107 which performs analog processing and/or digital processing with respect to a signal from the input circuit 106a. The diaphragms 104 and the input circuit 106a are disposed on a first die 102, and the signal processing circuit 107 is disposed on a second die 103, the first die 102 and the second die 103 being connected by wiring.
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Inventors:
Hideharu Tanaka
York frommel
York frommel
Application Number:
JP2018508019A
Publication Date:
February 19, 2020
Filing Date:
March 27, 2017
Export Citation:
Assignee:
Tohoku University
International Classes:
H04R19/04
Domestic Patent References:
JP2003102097A | ||||
JP200998022A | ||||
JP2009124474A | ||||
JP2008155333A | ||||
JP6300651A | ||||
JP2007124500A | ||||
JP2004147152A | ||||
JP2009118455A |
Foreign References:
US20160014530 |
Attorney, Agent or Firm:
Sumio Tanai
Masato Iida
Shu Oikawa
Masato Iida
Shu Oikawa