Title:
形状測定装置およびそれを搭載した塗布装置
Document Type and Number:
Japanese Patent JP6665028
Kind Code:
B2
Abstract:
Provided is a shape measurement device in which a control device (6) controls a piezo stage (5) and an imaging device (4), captures an image at each of a plurality of positions (h) while moving an interferometer (3) in an optical axis direction, determines a degree of separation (R) for a brightness histogram of the pixels of each image by discriminant analysis, arranges the piezo stage (5) in a position (hf) corresponding to the image having the maximum value (Rmax) for the degree of separation (R) among the plurality of images, and thereby arranges the focus (P1) of the interferometer (3) onthe surface of an object (7). As a result, it is possible to easily match the focus (P1) of the interferometer (3) to the surface of the object (7).
Inventors:
Hiroaki Ohba
Application Number:
JP2016099617A
Publication Date:
March 13, 2020
Filing Date:
May 18, 2016
Export Citation:
Assignee:
ntn corporation
International Classes:
G01B11/24; G01B9/02
Domestic Patent References:
| JP2007212268A | ||||
| JP2000056210A | ||||
| JP2015007564A | ||||
| JP2005285898A |
Attorney, Agent or Firm:
Fukami patent office