Title:
研磨装置、押圧ユニット、及び研磨方法
Document Type and Number:
Japanese Patent JP6667258
Kind Code:
B2
Inventors:
Hiroyoshi Nakatani
Application Number:
JP2015212816A
Publication Date:
March 18, 2020
Filing Date:
October 29, 2015
Export Citation:
Assignee:
Magaldi Industrie s.r.l
International Classes:
B24B5/06; B24B37/00; F02F1/24
Domestic Patent References:
| JP58110342U | ||||
| JP2006239836A | ||||
| JP4145281A | ||||
| JP61078559U |
Attorney, Agent or Firm:
Patent business corporation Yuko patent office