Title:
出力パルス光の生成方法
Document Type and Number:
Japanese Patent JP6669923
Kind Code:
B2
Abstract:
A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of multi-surface reflecting components (e.g., one or more etalons and one or more mirrors). The polarizing beam splitter passes input laser pulses through the wave plate to the multi-surface reflecting components, which reflect portions of each input laser pulse back through the wave plate to the polarizing beam splitter. The polarizing beam splitter reflects each reflected portion to form an output of the pulse multiplier. The multi-surface reflecting components are configured such that the output pulses exiting the pulse multiplier have an output repetition pulse frequency rate that is at least double the input repetition pulse frequency.
Inventors:
Chuwan Yun-ho
Armstrong Joseph Jay
Riou Justin Dienhwan
Dribbinsky Vladimir
Brown david ell
Armstrong Joseph Jay
Riou Justin Dienhwan
Dribbinsky Vladimir
Brown david ell
Application Number:
JP2019113342A
Publication Date:
March 18, 2020
Filing Date:
June 19, 2019
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01S3/10; G01B11/24; H01L21/66
Domestic Patent References:
| JP9213628A | ||||
| JP2010003755A | ||||
| JP2003270551A | ||||
| JP2008205486A | ||||
| JP6097560A | ||||
| JP2005236327A | ||||
| JP8204275A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office