Title:
光干渉計
Document Type and Number:
Japanese Patent JP6670284
Kind Code:
B2
Abstract:
To achieve low costs and miniaturization, as securing excellent measurement accuracy.SOLUTION: In a main body device 1, a measurement beam emitted by a measurement light light source MLS is incident upon a PM fiber, and is divided into irradiation light and reference light by a polarized wave holding fiber coupler 127. The reference light is emitted to a spatial optical path through the PM fiber, and is incident upon a beam splitter BS135 after a frequency is shifted by a frequency shifter. The irradiation light is transmitted to a detection unit 2 through the PM fiber, is emitted to the spatial optical path, and is irradiated on a measurement object 500 through an objective lens system of a first lens 24, second lens 25 and λ/4 plate 26. Reflection light reflected upon the measurement object 500 proceeds from the objective optical system to a polarization beam splitter PBS27. A P-polarization component is separated, is transmitted to the main body device 1 by the PM fiber and is emitted to the spatial optical path. The P-polarization component is coupled to the reference light by the beam splitter BS135.SELECTED DRAWING: Figure 2
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Inventors:
Ryota Oshima
Kenichiro Doi
Kenichiro Doi
Application Number:
JP2017228710A
Publication Date:
March 18, 2020
Filing Date:
November 29, 2017
Export Citation:
Assignee:
Ono Sokki Co., Ltd.
International Classes:
G01B9/02; G01H9/00
Domestic Patent References:
| JP3131764A | ||||
| JP2016223973A | ||||
| JP10185526A | ||||
| JP2016099221A | ||||
| JP63243704A |
Foreign References:
| US20090323074 |
Attorney, Agent or Firm:
Katsushi Sato