Title:
液体材料気化装置
Document Type and Number:
Japanese Patent JP6675865
Kind Code:
B2
Abstract:
In order to eliminate liquid accumulation occurring between a gas-liquid mixing part and a vaporization part to stably perform liquid feeding to the vaporization part and vaporization in the vaporization part, a liquid material vaporization apparatus includes: a gas-liquid mixing part adapted to mix a liquid material and gas to produce a gas-liquid mixture; and a vaporization part adapted to heat the gas-liquid mixture to vaporize the liquid material. In addition, the gas-liquid mixing part has a gas-liquid mixture lead-out pipe for leading out the gas-liquid mixture, the vaporization part has a heating flow path HS for heating the gas-liquid mixture, and a lead-out port of the gas-liquid mixture lead-out pipe is arranged in the heating flow path HS.
Inventors:
Taketoshi Ito
Inoue Regular
Inoue Regular
Application Number:
JP2015241703A
Publication Date:
April 08, 2020
Filing Date:
December 11, 2015
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
B01D1/14; B01F23/80; B01J4/00; C23C16/448; H01L21/205
Domestic Patent References:
| JP10140356A | ||||
| JP2012177193A | ||||
| JP200974108A |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai