Title:
材料を収容・加熱する坩堝及び坩堝と加熱器セットを含むシステム
Document Type and Number:
Japanese Patent JP6681125
Kind Code:
B2
Abstract:
The present invention relates to a crucible for accommodating and heating a material to be vaporized or sublimed and a system which comprises the crucible and a heater arrangement for heating the crucible. The crucible comprises: at least one concave recess, the concave recess is applicable to accommodating a material to be vaporized or sublimed, and the concave recess is formed on a first surface of the crucible; and a bottom recess and/or a side recess, the bottom recess is formed on a second surface of the crucible, the second surface is opposite to the first surface, and the side recess is formed in a side wall of the crucible, the side wall extends from the first surface to the second surface, wherein the side recess has an opening near the second surface of the crucible. The system comprises the crucible and a heater arrangement for heating the crucible, wherein the heater arrangement comprises at least one heater arranged in the bottom recess or the side recess of the crucible.
Inventors:
Bastian, Jeepishen
Christian,craft
Michael haar
Pengju
Girard, Carper
Vio, Jillmans
Christian,craft
Michael haar
Pengju
Girard, Carper
Vio, Jillmans
Application Number:
JP2018553289A
Publication Date:
April 15, 2020
Filing Date:
December 26, 2016
Export Citation:
Assignee:
China Triumph International Engineering Co.,Ltd.
CTF Solar GmbH
CTF Solar GmbH
International Classes:
C23C14/24
Domestic Patent References:
| JP2003166049A | ||||
| JP2007270261A | ||||
| JP6010118A |
Foreign References:
| CN203639543U | ||||
| WO2013001827A1 | ||||
| CN101550532A | ||||
| US3636305 |
Attorney, Agent or Firm:
Suguru Ito