Title:
ナノインプリント転写体の製造方法
Document Type and Number:
Japanese Patent JP6688464
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a production method of a nanoimprint transfer body by using micro phase separation caused by self organization of a block copolymer to form a nanostructure, and directly using the nanostructure as a master mold.SOLUTION: A production method of a nanoimprint transfer body includes the steps of: forming, on a substrate, a film including a block copolymer capable of microphase separation and an inorganic precursor incorporated in a polymer phase including one polymer block component constituting the block copolymer; subjecting the block copolymer to microphase separation to form a microphase separated structure including the block copolymer and the inorganic precursor incorporated in the polymer block component or the polymer phase including the polymer block component; removing organic components from the microphase separated structure to form a nanostructure of an inorganic component; and forming the nanoimprint transfer body by using the nanostructure as a master mold. The block copolymer is a block copolymer of polystyrene and polydimethylsiloxane.SELECTED DRAWING: Figure 2B
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Inventors:
Atsushi Miura
Yuri Sasaki
Hiroaki Wakayama
Yuri Sasaki
Hiroaki Wakayama
Application Number:
JP2017027133A
Publication Date:
April 28, 2020
Filing Date:
February 16, 2017
Export Citation:
Assignee:
Toyota Central R & D Labs.
International Classes:
B29C33/38; B29C59/02; G11B5/84; H01L21/027
Domestic Patent References:
| JP2012142065A | ||||
| JP2013142158A |
Foreign References:
| WO2011007878A1 | ||||
| US20160141528 |
Attorney, Agent or Firm:
Patent Business Corporation St. Crest International Patent Office