Title:
測定装置
Document Type and Number:
Japanese Patent JP6695746
Kind Code:
B2
Abstract:
Provided is a measuring device having improved operability. A head unit is fixedly coupled to an installation part with a stand. A measuring object is placed on a stage held by the installation part. The measuring object is irradiated obliquely downward with the measurement light having the pattern from the light projecting unit. The measurement light reflected obliquely upward by the measuring object is received by a selected one of first and second light receiving units, and a light reception signal representing a light reception amount is output. A second imaging visual field of the second light receiving unit is smaller than a first imaging visual field of the first light receiving unit, and included in the first imaging visual field. A second optical axis of the second light receiving unit is located below a first optical axis of the first light receiving unit.
Inventors:
Fujiwara Masaki
Shigeru Murakami
Takashi Nakatsu
Shigeru Murakami
Takashi Nakatsu
Application Number:
JP2016127054A
Publication Date:
May 20, 2020
Filing Date:
June 27, 2016
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01B11/25
Domestic Patent References:
| JP2014106094A | ||||
| JP8118023A | ||||
| JP2013228267A | ||||
| JP2001101410A | ||||
| JP2015206644A | ||||
| JP2013528291A |
Foreign References:
| US20070211258 |
Attorney, Agent or Firm:
Yoshito Fukushima
Masahiro Nakagawa
Sawamura Hideyuki
Masahiro Nakagawa
Sawamura Hideyuki