Title:
プローブガイド板及びその製造方法とプローブ装置
Document Type and Number:
Japanese Patent JP6706076
Kind Code:
B2
Abstract:
A probe guide plate includes a first silicon substrate having first through-holes formed therein, an insulation layer formed on the first silicon substrate and having an opening on a region in which the first through-holes are arranged, a second silicon substrate arranged on the insulation layer and having second through-holes formed at positions corresponding to the first through-holes, and a silicon oxide layer formed on exposed surfaces of the first silicon substrate and the second silicon substrate.
Inventors:
Kosuke Fujiwara
Yuichiro Shimizu
Yuichiro Shimizu
Application Number:
JP2016004970A
Publication Date:
June 03, 2020
Filing Date:
January 14, 2016
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
Nippon Electronic Materials Co., Ltd.
Nippon Electronic Materials Co., Ltd.
International Classes:
G01R1/06; H01L21/66
Domestic Patent References:
| JP2007171139A | ||||
| JP2000243942A | ||||
| JP2001118943A | ||||
| JP11258295A | ||||
| JP2014232030A |
Foreign References:
| US7546670 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Keizo Okamoto
Tadahiko Ito
Keizo Okamoto