Title:
ＭＥＭＳ素子及びその製造方法
Document Type and Number:
Japanese Patent JP6708532
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To satisfactorily perform sensitivity adjustment without enlarging an ASIC and without enlarging a size or increasing cost even in a MEMS element.SOLUTION: The present invention relates to a MEMS element comprising a stationary electrode 3 and a movable electrode 2 that is disposed substantially in parallel with the stationary electrode 3 via an air gap G. Three (or one) stationary electrode rings 10A-10C for trimming are disposed in an outer periphery of the stationary electrode 3. The stationary electrode rings 10A-10C are connected to a connection line 9 via fuse parts 12 that are provided in both ends of the connection line 9, for example, a disconnection current is made flow from each of electrode pads 15A-15C to the fuse part 12 and selected one of the stationary electrode rings 10A-10C is disconnected from the stationary electrode 3, thereby adjusting sensitivity while maintaining a pull-in voltage at a desired fixed value.SELECTED DRAWING: Figure 1
Inventors:
Shinichi Araki
Takahide Usui
Takahide Usui
Application Number:
JP2016213152A
Publication Date:
June 10, 2020
Filing Date:
October 31, 2016
Export Citation:
Assignee:
New Japan Radio Co., Ltd.
International Classes:
H04R19/04; B81B3/00; B81C1/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2006200920A | ||||
| JP2003207516A | ||||
| JP2014017565A | ||||
| JP2016002625A |
Attorney, Agent or Firm:
Yasuto Ogata