Title:
チャックテーブル
Document Type and Number:
Japanese Patent JP6713195
Kind Code:
B2
Abstract:
To provide a chuck platform capable of preventing clogging caused by intrusion of liquid. A chucking platform (10, 38) is provided on a processing device (2) for processing a plate-like workpiece (11), the chucking platform is used for holding a workpiece unit (1) composed of a workpiece, an annular frame (15) surrounding the workpiece, and an adhesive tape which is attached to the workpiece and the frame. The chuck platform comprises a main body part (42) having a holding surface (42a) for sucking and holding the workpiece through the adhesive tape; and a frame support part (48) which is on the outer side to support the frame. The frame support part is formed to have a smaller outer diameter than that of the frame, and if the frame support part is overlaid by the frame in such a way that the outer edge (15a) of the frame protrudes toward the outside of the frame support part, the upper portion of the main body part and the frame support part will be entirely covered by the workpiece unit.
Inventors:
Fukuoka Takeomi
Application Number:
JP2016010992A
Publication Date:
June 24, 2020
Filing Date:
January 22, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683; B24B41/06; H01L21/301
Domestic Patent References:
| JP3209742A | ||||
| JP2010021464A | ||||
| JP2015216161A | ||||
| JP2015005742A | ||||
| JP2014011422A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto