Title:
酸化物誘電体及びその製造方法、並びに固体電子装置及びその製造方法
Document Type and Number:
Japanese Patent JP6716602
Kind Code:
B2
Abstract:
An oxide layer 30 that is formed of one oxide dielectric body according to the present invention contains an oxide which is composed of bismuth (Bi), niobium (Nb) and titanium (Ti) (while optionally containing unavoidable impurities), and which has a crystal phase having a pyrochlore crystal structure. If the number of bismuth (Bi) atoms is taken as 1, the number of niobium (Nb) atoms is 0.5 or more but less than 1.7; and if the number of bismuth (Bi) atoms is taken as 1, the number of titanium (Ti) atoms is more than 0 but less than 1.3.
Inventors:
Tatsuya Shimoda
Satoshi Inoue
Tomoki Ariga
Shinji Takeuchi
Shigetoshi Segawa
Satoshi Inoue
Tomoki Ariga
Shinji Takeuchi
Shigetoshi Segawa
Application Number:
JP2017554982A
Publication Date:
July 01, 2020
Filing Date:
November 08, 2016
Export Citation:
Assignee:
National University Corporation Japan Advanced Institute of Science and Technology
Adamant Namiki Precision Jewel Co., Ltd.
Adamant Namiki Precision Jewel Co., Ltd.
International Classes:
H01L21/316; H01B3/12; H01G4/30; H01G4/33; H01L21/336; H01L29/786
Domestic Patent References:
| JP52138098A | ||||
| JP2005216951A | ||||
| JP2007217233A |
Foreign References:
| CN103496973A | ||||
| US20070100048 | ||||
| WO2014148336A1 | ||||
| WO2013069470A1 | ||||
| WO2013069471A1 |
Attorney, Agent or Firm:
Hiroaki Kono