Title:
表示装置
Document Type and Number:
Japanese Patent JP6725317
Kind Code:
B2
Abstract:
The object of the present invention is to make it possible to form an LTPS TFT and an oxide semiconductor TFT on the same substrate. A display device includes a substrate having a display region in which pixels are formed. The pixel includes a first TFT using an oxide semiconductor 109. An oxide film 110 as an insulating material is formed on the oxide semiconductor 109. A gate electrode 111 is formed on the oxide film 110. A first electrode 115 is connected to a drain of the first TFT via a first through hole formed in the oxide film 110. A second electrode 116 is connected to a source of the first TFT via a second through hole formed in the oxide film 110.
Inventors:
Isao Suzumura
Kazushi Watanabe
Yoshinori Ishii
Hidekazu Miyake
Yohei Yamaguchi
Kazushi Watanabe
Yoshinori Ishii
Hidekazu Miyake
Yohei Yamaguchi
Application Number:
JP2016100493A
Publication Date:
July 15, 2020
Filing Date:
May 19, 2016
Export Citation:
Assignee:
Japan Display Co., Ltd.
International Classes:
H01L29/786; H01L21/336; H01L21/8234; H01L27/06; H01L27/088; H01L51/50
Domestic Patent References:
| JP2007073703A | ||||
| JP2016534390A | ||||
| JP2013214732A | ||||
| JP2005340776A | ||||
| JP3190279A |
Foreign References:
| WO2015031037A1 | ||||
| US20150123084 | ||||
| CN104681491A | ||||
| CN105408813A | ||||
| KR1020160018825A | ||||
| KR1020150051824A | ||||
| US20160064465 | ||||
| WO2015052991A1 | ||||
| US20160064421 | ||||
| US5057186 | ||||
| KR19950021085A | ||||
| US20070063211 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation