Title:
極低温冷凍機および極低温冷凍機の制御装置
Document Type and Number:
Japanese Patent JP6727723
Kind Code:
B2
Abstract:
A cryocooler includes a cold head, a valve unit which includes a rotary valve configured to periodically switch a pressure of a working gas in the cold head between a first high pressure and a second high pressure lower than the first high pressure and a valve motor configured to rotate the rotary valve, the valve unit having a rotation angle range in which the rotary valve seals the working gas having the second high pressure in the cold head, a cryocooler control unit configured to control the valve motor, a cryocooler stop instruction unit configured to output a cryocooler stop instruction signal to the cryocooler control unit, and a valve stop timing control unit configured to control the valve motor to stop the rotary valve in the rotation angle range, according to the cryocooler stop instruction signal.
Inventors:
Takashi Hirayama
Application Number:
JP2017005024A
Publication Date:
July 22, 2020
Filing Date:
January 16, 2017
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F25B9/00; F25B9/14
Domestic Patent References:
| JP200524239A | ||||
| JP2005207632A | ||||
| JP375456A | ||||
| JP6272979A | ||||
| JP2004163083A |
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo