Title:
真空処理システムにおけるデバイスの非接触搬送用の装置及び方法
Document Type and Number:
Japanese Patent JP6735350
Kind Code:
B2
Abstract:
An apparatus for contactless transportation of a device in a vacuum processing system is described. The apparatus includes: a magnetic transportation arrangement for providing a magnetic levitation force (FL) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units; a sensor for monitoring a motion of the device, and a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.
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Inventors:
Ust, henning
Schuler, Jörg
Schuler, Jörg
Application Number:
JP2018545421A
Publication Date:
August 05, 2020
Filing Date:
August 24, 2017
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/677; B65G54/02; H02K41/03
Domestic Patent References:
| JP5086930U | ||||
| JP63201332U | ||||
| JP2017511682A | ||||
| JP6078413A | ||||
| JP61015557A | ||||
| JP2001310152A |
Foreign References:
| US20150122180 | ||||
| WO2006067974A1 | ||||
| WO2008066103A1 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation