固体撮像素子、固体撮像素子の製造方法および撮像システム

Japanese Patent JP6736318

B2

PROBLEM TO BE SOLVED: To reduce magnetic noise generating on the ground wiring in a solid state image sensor.SOLUTION: A solid state image sensor includes pixel ground wiring arranged on a pixel well region, peripheral ground wiring arranged on a peripheral well region, multiple pixels placed in the pixel well region, a read circuit placed in the peripheral well region, and having a first input terminal receiving pixel signals from the multiple pixels, and a second input terminal receiving a reference signal, and a reference signal circuit placed in the peripheral well region, having a first electrode to which the ground voltage is supplied, and outputting the reference signal to the second input terminal of the read circuit. The resistance value R1 of an electric path from one of multiple pixel well contacts to the first electrode, and the resistance value R2 of an electric path from one of multiple peripheral well contacts placed closest to the first electrode to the first electrode satisfy the relationship of R1