Title:
検査装置及び検査方法
Document Type and Number:
Japanese Patent JP6737598
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electron image tracking-type inspection device with high sensitivity.SOLUTION: An inspection device comprises: a stage device which continuously moves with a sample placed thereon; an electro-optical device; and a control unit. The electro-optical device comprises a primary optical system, a secondary optical system, and a detector. The secondary optical system includes a deflector which synchronizes with the movement of the stage device and deflects secondary beams by generating a superposed electric field with the use of a multipole so that the secondary beams generated from the same portion of the sample may be incident into the same portion of a two-dimensional sensor while the sample is moving along with the movement of the stage device. The two-dimensional sensor is an electron bombardment (EB) semiconductor sensor which outputs an image signal by directly detecting electrons of the secondary beams without converting them into light.SELECTED DRAWING: Figure 3
Inventors:
Masanori Hatakeyama
Application Number:
JP2016005367A
Publication Date:
August 12, 2020
Filing Date:
January 14, 2016
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01J37/244; H01J37/147; H01J37/20; H01J37/22; H01J37/28; H01J37/29; H01L21/66
Domestic Patent References:
| JP10197463A | ||||
| JP11108864A | ||||
| JP2000215843A | ||||
| JP2002093359A | ||||
| JP2011155119A | ||||
| JP2015002114A | ||||
| JP2015201257A |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Tsukuda Seigen
Hiroshi Nomoto
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Tsukuda Seigen
Hiroshi Nomoto