Title:
有機溶剤の精製方法および有機溶剤の精製装置
Document Type and Number:
Japanese Patent JP6737891
Kind Code:
B2
Abstract:
The present invention addresses the problem of providing an organic solvent refining method with which it is possible to obtain an organic solvent having excellent stability and restrict the occurrence of defects in a semiconductor device, and the present invention addresses the problem of providing an organic solvent refining apparatus. An organic solvent refining method according to the present invention comprises: a distillation step in which an organic solvent containing a stabilizer is distilled, the stabilizer in the organic solvent is diminished, and the content of the stabilizer in the organic solvent is made to be 0.1 to 30 ppm by mass; and after the distillation step, a refining step, in which the organic solvent is refined by using at least one member among a filter member having a filter of which the removed particle size is 20 nm or less and a metal ion adsorbing member, wherein the organic solvent refining method does not comprise an organic impurity removal step for removing organic impurities from the organic solvent by using an organic impurity adsorbing member.
Inventors:
Tetsuya Uemura
Application Number:
JP2018539585A
Publication Date:
August 12, 2020
Filing Date:
August 17, 2017
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
C07C41/42; C07C29/80; C07C31/125; C07C43/13; C07C45/82; C07C49/297; C07C49/303; C07C67/54; C07C69/14; C07C69/68; C07D307/33; G03F7/004
Domestic Patent References:
| JP58014902A | ||||
| JP2016073922A | ||||
| JP9049000A | ||||
| JP7268391A | ||||
| JP2006276688A | ||||
| JP2008276265A |
Foreign References:
| WO2016104565A1 | ||||
| WO2015122522A1 | ||||
| WO2013011870A1 |
Attorney, Agent or Firm:
Hideaki Ito
Fumio Mitsuhashi
Fumio Mitsuhashi