Title:
表示基板及びその製造方法、表示パネルと表示装置
Document Type and Number:
Japanese Patent JP6752246
Kind Code:
B2
Abstract:
The present disclosure provides a display substrate and a manufacturing method thereof, and a display panel. The display substrate has a display area and a peripheral area surrounding the display area, wherein a plurality of force sensors is provided in the peripheral area and the plurality of force sensors is made of polysilicon material, in a direction perpendicular to the display substrate, a first layer is provided directly under a layer where the plurality of force sensors is located, and a second layer is provided directly above the layer where the plurality of force sensors is located, a Young's modulus of at least one of the first layer and the second layer is larger than a Young's modulus of silicon oxide. The technical solution of the present disclosure can improve the detection accuracy of the force sensor with respect to a force.
Inventors:
Roh
Koji Shigemura
Koji Shigemura
Application Number:
JP2018040428A
Publication Date:
September 09, 2020
Filing Date:
March 07, 2018
Export Citation:
Assignee:
Shanghai Tianma Micro Electronics Co., Ltd.
International Classes:
G01L1/18; G09F9/00; G09F9/30; H01L27/32; H01L51/50; H05B33/02
Domestic Patent References:
| JP2013016777A | ||||
| JP2012033506A | ||||
| JP2011040726A | ||||
| JP2004109862A |
Foreign References:
| US20140353614 | ||||
| US20170185211 |
Attorney, Agent or Firm:
Seiji Nishiuchi