Title:
試料分析装置及び試料分析装置用集光ミラーユニット
Document Type and Number:
Japanese Patent JP6754780
Kind Code:
B2
Abstract:
A sample analysis device for detecting light emitted from a measurement sample irradiated with charged particles and analyzing the measurement sample, wherein in order to enable an analysis at a higher resolution than in the past, the sample analysis device is provided with: an irradiation unit 3 for irradiating the sample W with charged particles; a collector mirror 41 provided between the irradiation unit 3 and the sample W, the collector mirror 41 collecting light emitted from the sample W; and a retarding voltage application unit 6 for applying a retarding voltage, for decelerating the charged particles, onto the sample W or a sample stand 201 on which the sample W is placed.
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Inventors:
Shogo Awata
Application Number:
JP2017563837A
Publication Date:
September 16, 2020
Filing Date:
January 27, 2017
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
G01N23/2254; G01N21/62; G01N23/2255; H01J37/20; H01J37/244; H01J37/28
Domestic Patent References:
| JP2003106829A | ||||
| JP2011133446A | ||||
| JP2012028019A | ||||
| JP5347137A | ||||
| JP2006249478A | ||||
| JP2007071646A | ||||
| JP2004047284A | ||||
| JP2003014671A | ||||
| JP2011060555A |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai