Title:
複合基板の製造方法
Document Type and Number:
Japanese Patent JP6756843
Kind Code:
B2
Abstract:
An object of the present invention is to provide a method of manufacturing a composite substrate including a piezoelectric layer with less Li amount variation and a support substrate. A method of manufacturing a composite substrate of the present invention includes a step of performing ion implantation into a piezoelectric substrate, a step of bonding the piezoelectric substrate and the support substrate, a step of separating the bonded substrate, at an ion-implanted portion of the piezoelectric substrate, into the piezoelectric layer bonded to the support substrate and the remaining piezoelectric substrate after the step of bonding the piezoelectric substrate and the support substrate, and a step of diffusing Li into the piezoelectric layer after the separating step.
Inventors:
Masayuki Tanno
Kazutoshi Nagata
Masatsugu Akiyama
Koji Kato
Kazutoshi Nagata
Masatsugu Akiyama
Koji Kato
Application Number:
JP2018543966A
Publication Date:
September 16, 2020
Filing Date:
October 05, 2017
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
H03H3/08; H03H9/25
Domestic Patent References:
| JP2010109909A | ||||
| JP2016139837A | ||||
| JP2002534886A |
Attorney, Agent or Firm:
Shigeki Orizaka