Title:
光機能膜の製造方法、空間光変調素子の製造方法、光機能膜及び空間光変調素子
Document Type and Number:
Japanese Patent JP6757123
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical functional film that suppresses a reduction in accuracy of a fine structure.SOLUTION: There is provided a manufacturing method of an optical functional film including: a first step S202 of forming through holes 210a in a light receiving part 210 formed on a substrate P and forming a gap part 212 on the periphery of the light receiving part 210; and a second step S204 of performing thermal oxidation treatment of heating the substrate P after the first step S202.SELECTED DRAWING: Figure 8
Inventors:
Shun Sannomiya
Nguyen Van Touan
Takato Ono
Nguyen Van Touan
Takato Ono
Application Number:
JP2015093511A
Publication Date:
September 16, 2020
Filing Date:
April 30, 2015
Export Citation:
Assignee:
株式会社リコー
国立大学法人東北大学
国立大学法人東北大学
International Classes:
G02B26/08; G02F1/17; H01L27/146
Domestic Patent References:
| JP2005316321A | ||||
| JP2001296484A | ||||
| JP2015084071A | ||||
| JP2009092776A | ||||
| JP2005017468A | ||||
| JP2012108494A | ||||
| JP2008812A | ||||
| JP2003005124A | ||||
| JP2014213420A | ||||
| JP2004266991A |
Foreign References:
| US20120044129 |
Attorney, Agent or Firm:
Shuichi Kudo
Toru Kabayama
Shogo Honda
Toru Kabayama
Shogo Honda